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MRC-ID | Machine Name | Model | Manufacturer | Model Year | Wafer Size | Specifications | Status |
---|---|---|---|---|---|---|---|
MRC-0592 | RF3 | 300A | SCREEN | 2004 | 8" (SMIF) | 3xBARC,3xCoat,5xDEV,ASML Interface | available |
MRC-0593 | SK200W | BVPE | SCREEN | 2002 | 6"/8" | 1xBARC,2xCoat,4xDEV,ASML Interface | available |
MRC-0594 | SK80B | BVP | SCREEN | 2001 | 6"/8" | 2xCoat,2xDEV, IFB | available |
MRC-0595 | Chemical supply cabinet Coat | Trackmate | Microbar | 2012 | - | - | available |
MRC-0596 | Chemical supply cabinet DEV | Trackmate | Microbar | 2012 | - | - | available |
MRC-0597 | SS-80BW | A | SCREEN | 2012 | - | 4x backside scrubber, high pressure jet, soft-spray, brush, SC1, FFU | available |